https://doi.org/10.1351/goldbook.09255
Kinetic energy of particles on impact with a sample surface.
Notes:
- For primary-ion beams in secondary-ion mass spectrometry (SIMS), the ion impact energy is given by the difference in electric potential between the ion source and the sample surface multiplied by the charge on the ion. In some SIMS systems, the beam energy is given for the source potential with respect to ground, but the sample potential need not be at ground. The impact energy takes account of any sample potential.
- Use of the qualifier “impact” indicates that this is the energy of the particles striking the surface.