Ion beam system used for machining small regions with sub-micron precision.
Notes: - In general, FIBs use a liquid metal ion source to generate a finely focused ion beam with diameters typically in the range \(\pu{7 nm}\) to \(\pu{300 nm}\) and of sufficient flux, typically \(\pu{4 pA}\) to \(\pu{20 pA}\), to machine small items for study by Auger electron spectroscopy, secondary-ion mass spectrometry, or transmission electron microscopy in an economic time. They are also used to manufacture scanning probe microscopy tips, those for atom force microscopy having radii down to \(\pu{2 nm}\).
- FIB-machined surfaces can have an ion-damaged surface that needs to be removed.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1805 (https://doi.org/10.1515/pac-2019-0404)