Monitoring of signal intensity as a function of a variable that can be related to distance normal to the surface.
Note: Signal intensity is usually measured as a function of the sputtering time.
See also: compositional depth profile
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1802 (https://doi.org/10.1515/pac-2019-0404)