https://doi.org/10.1351/goldbook.09200
X-ray reflectometry in which significant scattered intensity arises from imperfections in the specimen, the scattered intensity falling outside the specular condition (see specular X-ray reflectometry).
Note: Imperfections generating diffuse XRR include surface and interface roughnesses, film defects, and inhomogeneities. Quantitative estimates of these can be made by modelling.