X-ray reflectometry in which significant scattered intensity arises from imperfections in the specimen, the scattered intensity falling outside the specular condition (see
specular X-ray reflectometry).
Note: Imperfections generating diffuse XRR include surface and interface roughnesses, film defects, and inhomogeneities. Quantitative estimates of these can be made by modelling.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1791 (https://doi.org/10.1515/pac-2019-0404)