https://doi.org/10.1351/goldbook.09199
Measurement method in which the elastically scattered intensity of X-rays from a reflecting surface is measured for small-angle deflections at grazing incidence.
Notes:
- The grazing incidence angle depends on photon energy and material and is typically less than \(\pu{2\!^{\circ}}\).
- GISAXS provides structural information for the surface or for particles on the surface, with lengths scales between several nm and several hundred nm.