Measurement method in which the elastically scattered intensity of X-rays from a reflecting surface is measured for small-angle deflections at grazing incidence.
Notes: - The grazing incidence angle depends on photon energy and material and is typically less than \(\pu{2\!^{\circ}}\).
- GISAXS provides structural information for the surface or for particles on the surface, with lengths scales between several nm and several hundred nm.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1791 (https://doi.org/10.1515/pac-2019-0404)