https://doi.org/10.1351/goldbook.09177
Measurement method to elucidate the composition and structure of the outermost atomic layers of a solid material, in which principally monoenergetic, singly-charged probe ions scattered from the surface are detected and recorded as a function of their energy, angle of scattering, or both.
Notes:
- MEIS is a form of ion beam analysis in which the probe ions, typically protons, have energies in the range
- By using channelling and aligning the incident-ion beam along a crystal axis, the scattering from the substrate can be suppressed, enhancing the signal quality and visibility obtained for amorphous overlayers. By further aligning the detector along a second crystal axis, the double-alignment mode, the scattering from the substrate can be further suppressed, improving the signal quality and visibility for amorphous overlayers to a high level.
- In some cases, an angle-sensitive detector is used that allows extensive structure and depth profile (see depth profiling) information to be obtained.
- The acronym usually has only one “S”.