low-energy ion scattering spectrometry

acronym: LEIS, LEISS
https://doi.org/10.1351/goldbook.09176
Measurement method to elucidate the composition and structure of the very outermost atomic layers of a solid material, in which principally monoenergetic, singly-charged probe ions scattered from the surface are detected and recorded as a function of their energy, angle of scattering, or both.
Notes:
  1. LEIS(S) is a form of ion beam analysis in which the probe ions, typically \(\ce{He+}\) or \(\ce{Ne+}\), have energies in the range \(\pu{0.1 keV}\) to \(\pu{10 keV}\).
  2. The acronym usually has only one “S”.
Source:
PAC, 2020, 92, 1781. (Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)) on page 1784 [Terms] [Paper]
Citation: 'low-energy ion scattering spectrometry' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09176 RIS BibTex EndNote
Div. VTextXMLJSON