Measurement method to elucidate the composition and structure of the very outermost atomic layers of a solid material, in which principally monoenergetic, singly-charged
probe ions scattered from the surface are detected and recorded as a function of their energy, angle of scattering, or both.
Notes: - LEIS(S) is a form of ion beam analysis in which the probe ions, typically \(\ce{He+}\) or \(\ce{Ne+}\), have energies in the range \(\pu{0.1 keV}\) to \(\pu{10 keV}\).
- The acronym usually has only one “S”.
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1784 (https://doi.org/10.1515/pac-2019-0404)