https://doi.org/10.1351/goldbook.08772
Measurement method of X-ray fluorescence to obtain quantitative and spatial information about elements in a sample.
Notes:
- X-ray beam energies of \(\pu{5 keV}\) excite core level vacancies and promote hard X-ray emission, for which the fluorescence yield is high.
- Spatial resolution is typically in the range from \(\pu{200 nm}\) to \(\pu{10 \upmu\!m}\), but, using specialised probes at synchrotron facilities, the lower limit can be decreased to tens of nanometers.