08772 IUPAC Gold Book - X-ray fluorescence microscopy 10.1351/goldbook.08772 08772 current initialism: XRM 1 Measurement method of X-ray fluorescence to obtain quantitative and spatial information about elements in a sample. X-ray beam energies of \(\pu{5 keV}\) excite core level vacancies and promote hard X-ray emission, for which the fluorescence yield is high. Spatial resolution is typically in the range from \(\pu{200 nm}\) to \(\pu{10 \upmu m}\), but, using specialised probes at synchrotron facilities, the lower limit can be decreased to tens of nanometers. PAC, 2021, 93, 69. 'Vocabulary of radioanalytical methods (IUPAC Recommendations 2020)' on page 107 (https://doi.org/10.1515/pac-2019-0302) https://goldbook.iupac.org/terms/view/08772/html https://goldbook.iupac.org/terms/view/08772/json https://goldbook.iupac.org/terms/view/08772/plain Citation: 'X-ray fluorescence microscopy' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.08772 The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms. If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org . The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using. 2026-05-18T03:35:56+00:00