https://doi.org/10.1351/goldbook.08770
Measurement method based on the transmission of X-rays to obtain three-dimensional images of a sample.
Note:
Spatial resolution is in the range \(\pu{100 nm}\) to \(\pu{10 \upmu\!m}\).
Spatial resolution is in the range \(\pu{100 nm}\) to \(\pu{10 \upmu\!m}\).