05484 IUPAC Gold Book - scanning electron microscopy 10.1351/goldbook.S05484 S05484 current initialism: SEM 1 Any analytical technique which involves the generation and evaluation of secondary electrons (and to a lesser extent back scattered electrons) by a finely focused electron beam (typically \(10\ \rm{nm}\) or less) for high resolution and high depth of field imaging. back scattered electrons https://goldbook.iupac.org//terms/view/B00583 secondary electrons https://goldbook.iupac.org//terms/view/S05518 PAC, 1983, 55, 2023. 'Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)' on page 2024 (https://doi.org/10.1351/pac198355122023) https://goldbook.iupac.org/terms/view/S05484/html https://goldbook.iupac.org/terms/view/S05484/json https://goldbook.iupac.org/terms/view/S05484/plain Citation: 'scanning electron microscopy' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.S05484 The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms. If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org . The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using. 2026-05-18T01:23:37+00:00