Any technique which measures the angular intensity distribution of electrons reflected from a crystalline surface under bombardment with low energy electrons (E0 < 500 eV) in larger angles of incidence. The diffraction pattern also provides very surface sensitive information on the atomic arrangement of the top layers of a solid.
Source:
PAC, 1983, 55, 2023. 'Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)' on page 2025 (https://doi.org/10.1351/pac198355122023)