ion microscopy

https://doi.org/10.1351/goldbook.I03221
Use of the secondary ion @M03746@ (SIMS) technique to obtain micrographs of the elemental (or isotopic) distribution at the surface of a sample with a spatial resolution of \(2\ \unicode[Times]{x3BC}\text{m}\) or better.
Source:
Orange Book, 2nd ed., p. 249 [Terms] [Book]
Citation: 'ion microscopy' in IUPAC Compendium of Chemical Terminology, 3rd ed. International Union of Pure and Applied Chemistry; 2006. Online version 3.0.1, 2019. https://doi.org/10.1351/goldbook.I03221 RIS BibTex EndNote
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Last revised: February 24, 2014