ion microscopy

abbrev: SIMS
https://doi.org/10.1351/goldbook.I03221
Use of the secondary ion mass spectrometry (SIMS) technique to obtain micrographs of the elemental (or isotopic) distribution at the surface of a sample with a spatial resolution of \(2\ \unicode[Times]{x3BC}\rm{m}\) or better.
Source:
Orange Book, 2nd ed., p. 249 [Terms] [Book]
Citation: 'ion microscopy' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.I03221 RIS BibTex EndNote
Div. VPDFTextXMLJSON