Title: electron probe X-ray microanalysis
Long Title: IUPAC Gold Book - electron probe X-ray microanalysis
DOI: 10.1351/goldbook.E02007
Status: current

Definition
Any analytical technique which uses the excitation and evaluation of the characteristic X-ray spectrum of a solid specimen by a focused electron beam (typically of a diameter of less than \(1\ \unicode[Times]{x3BC}\rm{m}\)). Qualitative and quantitative X-ray analysis is the main feature of EPXMA. For obtaining supplementary information the secondary, back scattered and absorbed electrons are also frequently observed. Qualitative and quantitative X-ray analysis is, however, the main feature of EPXMA.

Related Terms
- absorbed electrons: https://goldbook.iupac.org//terms/view/A00033
- back scattered: https://goldbook.iupac.org//terms/view/B00583
- secondary: https://goldbook.iupac.org//terms/view/S05518

Source
- PAC, 1983, 55, 2023. 'Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)' on page 2024 (https://doi.org/10.1351/pac198355122023)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/E02007/html
- json: https://goldbook.iupac.org/terms/view/E02007/json
- xml: https://goldbook.iupac.org/terms/view/E02007/xml

Citation: Citation: 'electron probe X-ray microanalysis' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.E02007
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Accessed: 2026-06-13T10:17:37+00:00