Title: electron probe microanalysis
Long Title: IUPAC Gold Book - electron probe microanalysis
DOI: 10.1351/goldbook.E02006
Status: current

Definition
General term for methods using bombardment of a solid specimen by electrons which generate a variety of signals providing the basis for a number of different analytical techniques.

Source
- PAC, 1983, 55, 2023. 'Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)' on page 2024 (https://doi.org/10.1351/pac198355122023)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/E02006/html
- json: https://goldbook.iupac.org/terms/view/E02006/json
- xml: https://goldbook.iupac.org/terms/view/E02006/xml

Citation: Citation: 'electron probe microanalysis' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.E02006
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Accessed: 2026-06-13T10:18:49+00:00