01672 IUPAC Gold Book - diamond by CVD 10.1351/goldbook.D01672 D01672 current initialism: CVD synonyms: CVD diamond, low-pressure diamond 1 Diamond by CVD (chemical vapour deposition) is formed as crystals or as films from various gaseous hydrocarbons or other organic molecules in the presence of activated, atomic hydrogen. It consists of \(\rm{sp}^{3}\)-hybridized carbon atoms with the three-dimensional crystalline structure of the diamond lattice. 'CVD diamond' or 'low-pressure diamond' are synonyms of the term diamond by CVD. diamond by CVD can be prepared in a variety of ways. Deposition parameters are: total (low) pressure, partial hydrogen pressure, precursor molecules in the gas phase, temperature for activation of the hydrogen and that of the surface of the underlying substrate. The energy supply for the hydrogen activation may be, for instance: heat, radio frequency, microwave excitation (plasma deposition) or accelerated ions (e.g. $\ce{Ar^{+}}$ ions). CVD diamond has also been obtained at atmospheric pressure from oxyacetylene torches and by other flame-based methods. Often CVD carbon films consist of a mixture of \(\rm{sp}^{2}\)- and \(\rm{sp}^{3}\)-hybridized carbon atoms and do not have the three-dimensional structure of the diamond lattice. In this case they should be called hard amorphous carbon or diamond-like carbon films. activation https://goldbook.iupac.org//terms/view/A00093 diamond https://goldbook.iupac.org//terms/view/D01671 diamond-like carbon films https://goldbook.iupac.org//terms/view/D01673 hard amorphous carbon https://goldbook.iupac.org//terms/view/H02741 hydrocarbons https://goldbook.iupac.org//terms/view/H02889 PAC, 1995, 67, 473. 'Recommended terminology for the description of carbon as a solid (IUPAC Recommendations 1995)' on page 487 (https://doi.org/10.1351/pac199567030473) https://goldbook.iupac.org/terms/view/D01672/html https://goldbook.iupac.org/terms/view/D01672/json https://goldbook.iupac.org/terms/view/D01672/plain Citation: 'diamond by CVD' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.D01672 The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms. If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org . The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using. 2026-04-19T00:54:08+00:00