Any technique in which a specimen is bombarded with keV-energy electrons or X-rays, and the energy distribution of the electrons produced through radiationless de-excitation of the atoms in the sample (Auger electrons) is recorded. The derivative curve may also be recorded.
Source:
PAC, 1983, 55, 2023. 'Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)' on page 2025 (https://doi.org/10.1351/pac198355122023)