Title: Auger electron spectroscopy
Long Title: IUPAC Gold Book - Auger electron spectroscopy
DOI: 10.1351/goldbook.A00522
Status: current

Definition
Any technique in which a specimen is bombarded with \(\mathrm{keV}\)-energy electrons or X-rays, and the energy distribution of the electrons produced through radiationless de-excitation of the atoms in the sample (Auger electrons) is recorded. The derivative curve may also be recorded.

Related Term
- Auger electrons: https://goldbook.iupac.org//terms/view/A00521

Source
- PAC, 1983, 55, 2023. 'Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)' on page 2025 (https://doi.org/10.1351/pac198355122023)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/A00522/html
- json: https://goldbook.iupac.org/terms/view/A00522/json
- xml: https://goldbook.iupac.org/terms/view/A00522/xml

Citation: Citation: 'Auger electron spectroscopy' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.A00522
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Accessed: 2026-06-07T11:27:40+00:00