vapor deposition
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https://doi.org/10.1351/goldbook.09582
Growth of solid materials on a substrate by deposition from the gas phase.
Source:
PAC, 2020,
92
, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1889 (https://doi.org/10.1515/pac-2018-1215)