shot noise

https://doi.org/10.1351/goldbook.09572
Noise which originates from the discrete nature of elementary charge.
Note: Shot noise decreases the resolution of an image in e-beam lithography.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1887 (https://doi.org/10.1515/pac-2018-1215)