resist profile
Copy
https://doi.org/10.1351/goldbook.09570
Topography of a
resist
pattern in cross section.
Source:
PAC, 2020,
92
, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1887 (https://doi.org/10.1515/pac-2018-1215)