Title: electron beam resist
Long Title: IUPAC Gold Book - electron beam resist
DOI: 10.1351/goldbook.09566
Status: current

Definition
Resist optimized for use under electron beam irradiation.

Related Term
- Resist: https://goldbook.iupac.org//terms/view/09564

Source
- PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1886 (https://doi.org/10.1515/pac-2018-1215)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/09566/html
- json: https://goldbook.iupac.org/terms/view/09566/json
- xml: https://goldbook.iupac.org/terms/view/09566/xml

Citation: Citation: 'electron beam resist' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09566
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Disclaimer: The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using.
Accessed: 2026-05-31T09:07:53+00:00