electron beam resist
synonyms
: e-beam resist, electron-beam resist
Copy
https://doi.org/10.1351/goldbook.09566
Resist
optimized for use under electron beam irradiation.
Source:
PAC, 2020,
92
, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1886 (https://doi.org/10.1515/pac-2018-1215)