{"term":{"id":"09564","title":"resist","longtitle":"IUPAC Gold Book - resist","doi":"10.1351\/goldbook.09564","code":"09564","status":"current","related":"<em>related<\/em>: negative-tone, positive-tone","definitions":[{"id":1,"text":"Material, usually a polymer, that when irradiated either undergoes a marked change in solubility in a given solvent or is ablated.","notes":{"1":"A resist polymer under irradiation either forms patterns directly or undergoes chemical reactions leading to pattern formation after subsequent processing.","2":"In a positive-tone resist, also called a positive-working resist, the material in the irradiated area not covered by a mask is removed on development, which results in an image with a pattern identical with that on the mask. In a negative-tone resist, also called a negative-working resist, the non-irradiated area is subsequently removed, which results in an image with a pattern that is the complement of that on the mask."},"links":[{"term":"development","url":"https:\/\/goldbook.iupac.org\/\/terms\/view\/09468"},{"term":"image","url":"https:\/\/goldbook.iupac.org\/\/terms\/view\/09495"},{"term":"mask","url":"https:\/\/goldbook.iupac.org\/\/terms\/view\/09523"}],"sources":["PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1886 (https:\/\/doi.org\/10.1515\/pac-2018-1215)"]}],"altoutputs":{"html":"https:\/\/goldbook.iupac.org\/terms\/view\/09564\/html","xml":"https:\/\/goldbook.iupac.org\/terms\/view\/09564\/xml","plain":"https:\/\/goldbook.iupac.org\/terms\/view\/09564\/plain"},"citation":"Citation: 'resist' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351\/goldbook.09564","license":"The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https:\/\/creativecommons.org\/licenses\/by-sa\/4.0\/) for individual terms.","collection":"If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org .","disclaimer":"The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using.","accessed":"2026-05-31T05:49:07+00:00"}}