Rectangular pattern of line-by-line scanning for
image capture used in
electron beam and ion-beam lithography.
See also: vector scan
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1886 (https://doi.org/10.1515/pac-2018-1215)