09561 IUPAC Gold Book - proximity effect 10.1351/goldbook.09561 09561 current 1 Widening of the exposure dose distribution, and hence the developed pattern, caused by the scattering of the primary beam electrons within the resist and substrate. exposure dose https://goldbook.iupac.org//terms/view/09477 resist https://goldbook.iupac.org//terms/view/09564 PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1885 (https://doi.org/10.1515/pac-2018-1215) https://goldbook.iupac.org/terms/view/09561/html https://goldbook.iupac.org/terms/view/09561/json https://goldbook.iupac.org/terms/view/09561/plain Citation: 'proximity effect' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09561 The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms. If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org . The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using. 2026-07-14T12:18:05+00:00