post-exposure delay
acronym
: PED
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https://doi.org/10.1351/goldbook.09559
Pause between successive patterning steps in lithographic processing.
Source:
PAC, 2020,
92
, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1885 (https://doi.org/10.1515/pac-2018-1215)