post-exposure bake
synonym
: post bake
acronym
: PEB
Copy
https://doi.org/10.1351/goldbook.09558
Thermal
annealing
step following the exposure of a resist to imaging radiation.
Source:
PAC, 2020,
92
, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1885 (https://doi.org/10.1515/pac-2018-1215)