post-apply bake
acronym
: PAB
Copy
https://doi.org/10.1351/goldbook.09557
Thermal
annealing
step following the coating of a substrate with a
resist
material.
Source:
PAC, 2020,
92
, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1885 (https://doi.org/10.1515/pac-2018-1215)