Title: positive-tone development
Long Title: IUPAC Gold Book - positive-tone development
DOI: 10.1351/goldbook.09556
Status: current

Definition
Process for revealing the latent image in a resist in which the exposed regions are more soluble in the developer than are the unexposed regions.

Related Term
- resist: https://goldbook.iupac.org//terms/view/09564

Source
- PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1884 (https://doi.org/10.1515/pac-2018-1215)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/09556/html
- json: https://goldbook.iupac.org/terms/view/09556/json
- xml: https://goldbook.iupac.org/terms/view/09556/xml

Citation: Citation: 'positive-tone development' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09556
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Accessed: 2026-06-28T14:34:12+00:00