Coating used to create a level surface during lithographic processing.
Note: This layer is often organic and may be called an organic planarizing layer (OPL).
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1884 (https://doi.org/10.1515/pac-2018-1215)