Title: pattern transfer
Long Title: IUPAC Gold Book - pattern transfer
DOI: 10.1351/goldbook.09547
Status: current

Definition
Transfer of the pattern of a developed lithographic image to an underlying substrate by processes such as etching.

Related Terms
- etching: https://goldbook.iupac.org//terms/view/09488
- image: https://goldbook.iupac.org//terms/view/09495

Source
- PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1882 (https://doi.org/10.1515/pac-2018-1215)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/09547/html
- json: https://goldbook.iupac.org/terms/view/09547/json
- xml: https://goldbook.iupac.org/terms/view/09547/xml

Citation: Citation: 'pattern transfer' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09547
License: The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms.
Collection: If you are interested in licensing the Gold Book for commercial use, please contact the IUPAC Executive Director at executivedirector@iupac.org .
Disclaimer: The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using.
Accessed: 2026-07-01T15:18:57+00:00