near-field scanning optical microscopy

initialism: NSOM
https://doi.org/10.1351/goldbook.09543
Microscopy applied to the investigation of nanostructures that breaks the farfield resolution limit by exploiting the properties of evanescent waves.
Note: NSOM can be used to make nanopatterns.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1881 (https://doi.org/10.1515/pac-2018-1215)