X-ray lithography
Copy
https://doi.org/10.1351/goldbook.09520
Lithography
performed by exposing a
resist
to X-radiation through an
image
mask
.
Source:
PAC, 2020,
92
, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215)