Lithography in which material is deposited into the interstices of a 2D array of nanospheres that are subsequently removed to form a pattern.
Note: Vapor deposition is the most commonly used deposition technique.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1878 (https://doi.org/10.1515/pac-2018-1215)