extreme ultraviolet lithography

initialism: EUVL
https://doi.org/10.1351/goldbook.09507

Photolithography performed by exposing a resist to extreme ultraviolet (\(\pu{13 nm}\)) radiation.

Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1877 (https://doi.org/10.1515/pac-2018-1215)