electron beam lithography
synonym
: e-beam lithography
Copy
https://doi.org/10.1351/goldbook.09505
Lithography
performed by exposing a
resist
to a beam of electrons.
Source:
PAC, 2020,
92
, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1877 (https://doi.org/10.1515/pac-2018-1215)