direct-write lithography
Copy
https://doi.org/10.1351/goldbook.09504
Pattern created without recourse to irradiation through a
mask
of the
image
.
Note:
Typical direct-write imaging systems are
electron-beam lithography
and ion-beam lithography.
Source:
PAC, 2020,
92
, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1876 (https://doi.org/10.1515/pac-2018-1215)