line width roughness
initialism
: LWR
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https://doi.org/10.1351/goldbook.09501
Variations in the width of a linear
resist
feature over an extended length.
Source:
PAC, 2020,
92
, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1876 (https://doi.org/10.1515/pac-2018-1215)