Pattern produced in or on a substrate during a lithographic process.
Note: The term was originally used to describe patterns produced by means of light exposure followed by
development, but with the growth in the number of lithographic methods it may now refer to those produced by molding,
embossing, or other kinds of patterning processes.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1875 (https://doi.org/10.1515/pac-2018-1215)