Deposition of a crystalline over layer on a crystalline substrate.
Notes: - The over layer is called an epitaxial film or epitaxial layer.
- An ordered spatial relationship existing between the lattices of substrate crystals and those grown by epitaxial crystallization on top of the substrate crystals.
- Examples involving polymers are given under the terms homoepitaxy and heteroepitaxy, where if the crystals are of the same substance, but possibly different polymorphs, the former term applies, in contrast to the use of the latter term, which involves crystals of two different substances.
- The term epitaxy is sometimes used for epitaxial crystallization. This use is not recommended.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1874 (https://doi.org/10.1515/pac-2018-1215)