double exposure

https://doi.org/10.1351/goldbook.09478
Lithographic process requiring two exposures to radiation for a single resist layer to form a finished pattern.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1872 (https://doi.org/10.1515/pac-2018-1215)