https://doi.org/10.1351/goldbook.09462
Length of the smallest geometrical features that can be formed in a lithographic process.
Notes:
- The final device CD is often notably smaller than the smallest geometrical features that can be formed in a lithographic process, achieved, for example, by etch or slimming processes.
- The critical dimension uniformity (CDU), which is a statistical measurement of the variation in length of the smallest geometrical feature, is often as low as \(3\:\upsigma\) of \(\pu{10\%}\) of the CD.