contact hole

https://doi.org/10.1351/goldbook.09459
Hole in a layer of a semiconductor device enabling contact with an underlying semiconductor layer.
Note: Contact holes are usually of a diameter less than \(\pu{100 nm}\).
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1869 [Terms] [Paper]