bottom anti-reflective coating

acronym: BARC
https://doi.org/10.1351/goldbook.09455
Layer placed between a photoresist and a substrate to prevent reflection from the latter resulting in a reduction in photoresist pattern quality, as characterized by resolution, line edge roughness, etc.
Source:
PAC, 2020, 92, 1861. (Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)) on page 1868 [Terms] [Paper]
Citation: 'bottom anti-reflective coating' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. https://doi.org/10.1351/goldbook.09455 RIS BibTex EndNote
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