Title: base quencher
Long Title: IUPAC Gold Book - base quencher
DOI: 10.1351/goldbook.09453
Status: current

Definition
Base added to a chemical amplification resist to neutralize low levels of acid that might diffuse into nominally unexposed regions and cause blur.

Related Term
- chemical amplification resist: https://goldbook.iupac.org//terms/view/09565

Source
- PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1868 (https://doi.org/10.1515/pac-2018-1215)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/09453/html
- json: https://goldbook.iupac.org/terms/view/09453/json
- xml: https://goldbook.iupac.org/terms/view/09453/xml

Citation: Citation: 'base quencher' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09453
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Accessed: 2026-07-23T16:51:51+00:00