High-resolution scanning probe microscopy that maps a surface with a demonstrated resolution of the order of fractions of a nanometer.
Note: Such tools for microscopy may also be used for nanoscale pattern generation of thin organic films on substrates.
Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1867 (https://doi.org/10.1515/pac-2018-1215)