Title: thermal annealing
Long Title: IUPAC Gold Book - thermal annealing
DOI: 10.1351/goldbook.09449
Status: current

Definition
Annealing in which a heating step is used to activate chemical processes in a resist that depend on diffusion.

Note
Thermal annealing is frequently employed in photolithography and in block copolymer lithography.

Related Terms
- block copolymer lithography: https://goldbook.iupac.org//terms/view/09454
- photolithography: https://goldbook.iupac.org//terms/view/09517
- resist: https://goldbook.iupac.org//terms/view/09564

Source
- PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1867 (https://doi.org/10.1515/pac-2018-1215)

Other Outputs
- html: https://goldbook.iupac.org/terms/view/09449/html
- json: https://goldbook.iupac.org/terms/view/09449/json
- xml: https://goldbook.iupac.org/terms/view/09449/xml

Citation: Citation: 'thermal annealing' in IUPAC Compendium of Chemical Terminology, 5th ed. International Union of Pure and Applied Chemistry; 2025. Online version 5.0.0, 2025. 10.1351/goldbook.09449
License: The IUPAC Gold Book is licensed under Creative Commons Attribution-ShareAlike CC BY-SA 4.0 International (https://creativecommons.org/licenses/by-sa/4.0/) for individual terms.
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Disclaimer: The International Union of Pure and Applied Chemistry (IUPAC) is continuously reviewing and, where needed, updating terms in the Compendium of Chemical Terminology (the IUPAC Gold Book). Users of these terms are encouraged to include the version of a term with its use and to check regularly for updates to term definitions that you are using.
Accessed: 2026-05-08T10:54:00+00:00