thermal annealing

in lithography

https://doi.org/10.1351/goldbook.09449

Annealing in which a heating step is used to activate chemical processes in a resist that depend on diffusion.

Note: Thermal annealing is frequently employed in photolithography and in block copolymer lithography.

Source:
PAC, 2020, 92, 1861. 'Terminology of polymers in advanced lithography (IUPAC Recommendations 2020)' on page 1867 (https://doi.org/10.1515/pac-2018-1215)