Depth profile in
secondary-ion mass spectrometry where the depth over which significant changes occur is less than
\(\pu{10 nm}\).
Source:
PAC, 2020, 92, 1781. 'Glossary of methods and terms used in surface chemical analysis (IUPAC Recommendations 2020)' on page 1846 (https://doi.org/10.1515/pac-2019-0404)